吉强民,郜小勇,高会,翟耀飞

• 1:郑州大学物理工程学院

摘要(Abstract)：

采用溶胶-凝胶旋涂法,以醋酸锌、乙二醇甲醚和乙醇胺为反应前驱物,在不同前热处理温度下制备了ZnO纳米薄膜.采用XRD和SEM研究了前热处理温度对ZnO薄膜微结构的影响,并剖析了溶胶溶液中存在的反应和产物.单采用前热处理得不到结晶性很好的(002)择优取向的ZnO纳米薄膜.当前热处理温度为250℃时,经过400℃后热处理后ZnO薄膜的(002)择优取向性最佳.前热处理时湿膜中未完全分解的有机物在后热处理过程中的分解,以及过高的前热处理温度使得凝胶网络中的有机物剧烈脱附,对凝胶网络结构造成损伤,不利于薄膜(002)择优取向生长,前者是造成薄膜出现微米尺度均匀褶皱的根本原因.

关键词(KeyWords)： ZnO薄膜;溶胶-凝胶旋涂法;前热处理温度;微结构

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金资助项目(60807001)

作者(Author): 吉强民,郜小勇,高会,翟耀飞

DOI: 10.13705/j.issn.1671-6841.2016026

参考文献(References)：

• [1]OZGUR U,ALIVOV Y I,LIU C,et al.A comprehensive review of Zn O materials and devices[J].Appl Phys,2005,98(4):041301.
• [2]徐航,李梅,于天龙.不同反应器形式下纳米Zn O光催化降解活性红[J].河南科技大学学报(自然科学版),2014,35(1):97-101.
• [3]RYU Y R,LEE T S,LEEM J H,et al.Fabrication of homostructural Zn O p-n junctions and ohmic contacts to arsenic-doped p-type Zn O[J].Appl Phys Lett,2003,83(19):4032-4034.
• [4]徐玉睿,田永涛,王文闯,等.Zn O纳米管阵列/p-Si异质结构的低温控制合成及其光电性能[J].郑州大学学报(理学版),2012,44(2):56-61.
• [5]KAWAHARAMURA T,ORITA H,SHIRAHATA T,et al.Influence of annealing under reducing ambient on properties of Zn O thin films prepared by mist CVD[J].Phys Stat Sol,2012,9(2):190-193.
• [6]程萍,田永涛,王文闯,等.Zn O纳米线阵列/p-Si异质结的合成及其整流特性[J].郑州大学学报(理学版),2011,43(3):87-90.
• [7]YOSHINO K,TANAKA M,IDE A,et al.Surface morphology of transparent conductive Zn O films grown by DC sputtering method[J].Advanced materials research,2014,894:403-407.
• [8]ZENG Y,ZHAO Y,JIANG Y J.Zn O thin films prepared on titanium substrate by PLD technique at different substrate temperatures[J].Surface and interface analysis,2014,46(9):602-606.
• [9]LEE J H,YEO B W,PARK B O.Effects of the annealing treatment on electrical and optical properties of Zn O transparent conduction films by ultrasonic spraying pyrolysis[J].Thin solid films,2004,457(2):333-337.
• [10]王岳,吴新民,陈晓黎.纳米Zn O的制备与应用[J].信阳师范学院学报(自然科学版),2005,18(3):346-349.
• [11]WEN B,LIU C Q,FEI W D,et al.Effect of doped boron on the properties of Zn O thin films prepared by sol-gel spin coating[J].Chemical research in Chinese universities,2014,30(3):509-512.
• [12]黄辉,朱明伟,宫骏,等.溶剂、溶胶稳定剂和热处理对溶胶-凝胶法制备的Zn O薄膜微观结构的影响[J].金属学报,2007,43(10):1043-1047.
• [13]SANG H Y,LIU D,SHEN D,et al.Effect of chelating agents on the preferred orientation of Zn O films by sol-gel process[J].Journal of materials science,2008,43(18):6177-6181.
• [14]KIM Y S,TAI W P,SHU S J.Effect of preheating temperature on structural and optical properties of Zn O thin films by sol-gel process[J].Thin solid films,2005,491(1/2):153-160.